[mems-talk] How to remove the PMMA etching residue.

[Xiaojing Zou]

Hi:

    I did some CF4 and CHF3 etching SiO2 using PMMA as mask. But I found that there is alway something left around the etched SiO2.  Does anybody have these kinda experience about removal of these stuff ?? (It cannot be removed by acetone)


Best Regards

Xiaojing Zou