[mems-talk] Adhesives wafer bonding

[Cheng-Yu Hsieh]

Hi Everybody,
I am trying to bond one 4 inch silicon wafer to a 8 inch silicon wafer.
I need a temporary bonding adhesive which I should be able to remove
after I have done chemical mechanical planarization process on the 4 inch wafer.

Does anybody know of commercially available adhesives
that I can use for this? I need an adhesive which is
very  simple in it's application and ideally would
like something which I can just apply in-between the
two wafers and then stick them together and later
should be able to de-bond them easily too.

Cheng-Yu Hsieh

Institute of MicroElectroMechanical System , National Tsing Hua 
University, 101, Sec. 2, Kuang-Fu Road,Hsinchu ,Taiwan 300 , ROC