[mems-talk] Su8-2100 soft bake

[Barbara Cortese]

Dear all

Recently we met a problem using SU-8 2100. When spinning (at 1000rpm),after softbake treatment, waves appear on the layer. The hotplate I use is levelled, and I am using as a substrate silicon. The soft bake lasts 15 minutes at 65°and 60 min at 95°. I tried longer times of soft bake but the problem is always the same, and the layer is always soft.
Can you help me to solve this problem? What do you think the problem is caused by?


Barbara Cortese


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