[mems-talk] Quartz wet etching

Jesse D Fowler Jesse.D.Fowler at aero.org
Mon Dec 18 12:12:56 EST 2006


It looks like Peter's suggesting wet etching the Cr with your mask. For 
lift-off, you would have to image-reverse your mask.

Jesse Fowler

"Barbara Cortese" <KORTESEB at libero.it>
Subject Re: [mems-talk] Quartz wet etching

Dear Peter
Are you suggesting to evaporate a Cr layer after developing the 
photoresist and no hardbake?
Don't you think it could be a problem of the type of photoresist?


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