[mems-talk] SU-8 Adhesion with SiO2

[John Seymour]

Prakash, I've experienced this myself. SU-8 delamination during 
development can only be solved w/ better adhesion to the underlying 
layer--process params will do little to improve the situation. I 
purchased a Ti oxide (http://www.siliconresources.com/AP300.html) and it 
worked very well. Surface roughening or metal deposition will also work. 
Good luck.
-john at MNF