[mems-talk] SU-8 Adhesion with SiO2

[Sueda Saylan]

Hello Prakash,

I've personally started to work with SU8 a few weeks ago. The literature 
survey showed me that adhesion is a general problem with SU8, a reliable 
process requires dedication. I've found two recipes, which are common in 
the sense that, soft bake needs to be kept long. The first refererence 
which is a paper by Judy et al., has coated 250 um of SU8 with the 
following recipe:

soft bake: 5 min@ 50°C, ramp up: 90 min @ 95°C, cool down: 10 min prior 
to exposure

Second recipe is from the following link: http://www.geocities.com/guerinlj/
Dehydration and softbake takes a lot of time.

I personally coated SU8-2005 on bare glass substrate with the second 
recipe and I haven't faced any adhesion problems but the thing is that 
the process can be optimized to shorten the process time a little bit.

Please, let me know how it works on SiO2 and it would be nice to share 
our experience.

Regards,
Sueda Saylan

PhD. Student
Microelectronics
Faculty of Engineering and Natural Sciences
Sabanci University

ph: +90 216 4839000 - 2307
fx: +90 216 4839550
email: sueda at su.sabanciuniv.edu