[mems-talk] How to clean single crystal TiO2 with chemicals?

[Xiaojing Zou]

Hi:

    Is there anybody having experience with wet etching single crystal TiO2 
substrate??? I want to etch the surface for half micron deep.  I tried H2SO4 
and HF, but it does not do the job. But as far as I know, acid will attach 
TiO2.

   I do not quite understand why it is so hard to etch single crystal 
materials??

Xiaojing