[mems-talk] Corner compensation mask design

[Andrea Mazzolari]

Hi all,
i want to realize bulk etching of a silicon wafer realizing this structure:
http://www.alientech.it/holes.gif
Silicon wafer is oriented (110), and white rectangles are holes into  
wafer, rotated of 2 degrees with respect to flat.
I'm planning to use a wet-etch.
I'm looking for tutorials wich well explain how to design corner  
compensation structures in order to have perfect corners on the (110)  
silicon wafer.
Could someone suggest me a good reading?
Is there a cad which, given in input a graphical file which containt  
desidered geometries, is able to automatically design compensation  
structure ?

Many thanks,
Andrea.