[mems-talk] PDMS/Ti bonding

weiyut at uci.edu weiyut at uci.edu
Wed Nov 1 16:03:37 EST 2006


Hi, All,

I have a question about PDMS/Ti bonding. Does anybody try to do the use
plasma treament on both pdms and Ti surface and then bind it? What is the
bonding strength?

Best

Wei-Yu



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