[mems-talk] Problem on Pt depostion by FIB

[jpt sharma]

Dear Alls
  I am having the problems to deposit Pt (making electrical contacts) using dual beam FIB. I am using e-beam depostion (not sure why I am not using Ion beam depostion, what I heard that ion beam may destroy the sample). Since I deposited Pt, I was expecting the metallic behaviour when cool it down to 4.2K. But what I get is semiconducting behaviour. Do you guys the answer? Why this happen and how to get rid of it?
  Your reply will be highly appreciated!
   
  JPT