[mems-talk] Re: Corner compensation mask design

[Andrea Mazzolari]

Hi all,

> One paper you might find interesting is Aqueous KOh etching of silicon
> (110), By Byungwook kim. journal of Electrochemical society, vol 145, no.
> 7 july 1998. email me if you can't find the paper and i can send the pdf.

i indepently found it, it's an interesting reading! Anyway i could not
find nothing else related to corner compensation on (110) silicon wafers!

> new simulation tool Etch3D by coventorware can tell you how the wet
> etching will go on different orientations.

it seams it's a nice software, but it also seams that it is not able to
automatically design corner compensation features. I think it would be
useful a software with the ability to automatically design compensation
structures...Does anyone know a software with this feature ?

Best regards,
Andrea