[mems-talk] grainy aluminum film

Andrew Xiang andrewxiang at gmail.com
Mon Nov 6 10:46:27 EST 2006


We looked at our aluminum under SEM and notice the surface is very grainy under 40,000X. Don't know if it is normal. The Al is evaporated at 1E-6 torr at 50A/s. Thickness about 1600A. Are there ways to reduce the grain structure and make it more smooth?

-Andrew


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