[mems-talk] grainy aluminum film

[Kannan Ramaraj]

Dear All! 
    Myself, R.Kannan, Research Scholar in Aerospace Engineering Department of IISc Bangalore. I am working in the area of Liquid drop impact over Superhydrophobic surfaces. I am thinking of getting surfaces with a contact angle ranging from 130 to 170 using fluoropolymer coated nanostructured surfaces. I decided to go with Al or Al2O3. will it be useful to get this much amount of contact angle. I decided to prepare the Nanostructured surfaces using Electron Beam Method. Please help me by providing the details of substrate temperature and other related settings for E Beam to coat Al or Al2O3. How much roughness can i get that method ? Please help me in this regard.
          Thanking you,
                         Yours Truly,
                           R.Kannan.