[mems-talk] about double coating and lithography of thick SPR220

[Zhang Xiao Qiang]

Dear friends

Anyone has the experiences about double/multi coating and lithography of
thick SPR220. I would like to use it get a near vertical side wall of my
patterns: the holes with aspect ratio of 2:1 and diameter of 2-6 micron.
I believe it is better than AZP 4620 as their datasheet show.

Any comments and recommendation are welcomed and highly appreciated.  

Thank you & have a nice day!
Best regards!

Dr. Zhang XiaoQiang
Singapore-MIT Alliance
Department of Materials Science and Engineering
National University of Singapore
Email:smazxq at nus.edu.sg
Tel: +65-6516 1266
Fax: +65-6874 2081