[mems-talk] Porous silicon: thermal expansion coefficient, specific heat

[Miyakawa, Natsuki]

Dear all, 

does anyone know the thermal expansion coefficient and specific heat of porous silicon? I know they are strongly dependent on the porosity, so the data for some specific parameters or rough estimation would also help. 
I would appreciate any informations and suggestions from you.

Thanks a lot!

Natsuki Miyakawa

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Sensor Systems & Integration
 
EADS Deutschland GmbH
Corporate Research Centre Germany
Dept. LG-SI 
81663 Munich/Germany
 
Phone:  +49 (0) 89.607-22875
Fax:      +49 (0) 89.607-24001
email: mailto:natsuki.miyakawa at eads.net
http://www.eads.net

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