[mems-talk] wafter process boat (or cassatte) can be immersed in SU8 developer

Shao Guocheng sgc_opt at yahoo.com.cn
Wed Nov 15 20:19:09 EST 2006


hi, guys:
       I need some wafter boat which can be immersed into the SU8 developer. I have some which came with the wafer I bought. But I'm not sure which material are they made of, or can they resist the SU8 developer? Is there anyone who has experience on this, or do u know where to buy such kind of process boats, any suggestion will be appriecated. thx
   
  Guocheng Shao 
   
  Mechanical Engineering, LSU



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