[mems-talk] TMMF/TMMR

Lujun Zhang L.Zhang at TUDelft.NL
Thu Nov 23 05:14:21 EST 2006


Hello all

we are going to try permanent photoresist TMMF/TMMR. Does anybody have any 
experience with that material? How is the mechanical strength of the dry 
filmresist over microchannels. What kind of laminator do you use? And do you 
know how toxic this material and the developer will be?

Best regards
Lujun 



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