[mems-talk] Porous silicon: thermal expansion coefficient, specific heat

[mohendra roy]

first let me know in what solution you etch the silicon. Than after i can
give you the exact value of the tharmal expansion coeffcient.

On 14/11/06, Miyakawa, Natsuki <Natsuki.Miyakawa at eads.net> wrote:
>
> Dear all,
>
> does anyone know the thermal expansion coefficient and specific heat of
> porous silicon? I know they are strongly dependent on the porosity, so the
> data for some specific parameters or rough estimation would also help.
> I would appreciate any informations and suggestions from you.