[mems-talk] Silicon nitride residual stress

[Andrea Mazzolari]

Hi all.
I need to determine residual stress in LPCVD silicon nitride.
Realizing silicon nitride cantilevers whould be possibile to measure silicon
nitride residual stress.
Measuring not-loaded cantilever deflection it whould be possible to
determine stress gradient, is this correct?
Whould be possible to measure also residual stress starting from silicon
nitride cantilevers ?

Best regards,
Andrea Mazzolari