[mems-talk] Anisotropic Wet Etching of Silicon nitride

[bobhendu at aol.com]

Ed:
 
It would be much easier to plasma etch silicon nitride anisotropically. I don't know of a masking material that would hold up to 180 degree C. Phosphoric Acid bath. Bob Henderson 
 
 
-----Original Message-----
From: ess26 at runbox.com
To: mems-talk at memsnet.org
Sent: Tue, 28 Nov 2006 12:28 PM
Subject: [mems-talk] Anisotropic Wet Etching of Silicon nitride


Dear colleagues,

Does anybody knows a way how to ANISOTROPICALLY wet etch Silicon Nitride?

Thanks in advance for your feedback.

Cheers,
Ed S