[mems-talk] Alternative intermediate layer to guarantee adhesion
Ronan O'Reilly
X00003978 at itnet.ie
Wed Nov 29 03:37:33 EST 2006
Hello all,
Can any one suggest an alternative method then a Cr intermediate layer that will guarantee the adhesion of metals such as Au, Pt and in particular Ag to a silicon substrate? I need a non metallic intermediate layer, such as a polymer. Does any body know of a reagent (and its distributor) that will be suited to the task. Preferably I am looking for a low curing (150oC) photosensitive polymer but I am open to other alternatives.
MANY THANKS
Rónán O'Reilly,
ITT Dublin
Dublin
Ireland
Email: Ronan.oreilly at itnet.ie
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