[mems-talk] Alternative intermediate layer to guarantee adhesion

Ronan O'Reilly X00003978 at itnet.ie
Wed Nov 29 03:37:33 EST 2006


Hello all,

Can any one suggest an alternative method then a Cr intermediate layer that will guarantee the adhesion of metals such as Au, Pt and in particular  Ag  to a silicon substrate? I need a non metallic intermediate layer, such as a polymer. Does any body know of a reagent (and its distributor) that will be suited to the task. Preferably I am looking for a low curing (150oC) photosensitive polymer but I am open to other alternatives.

MANY THANKS

Rónán O'Reilly,
ITT Dublin 
Dublin
Ireland
Email: Ronan.oreilly at itnet.ie


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