[mems-talk] PDMS activation

[Laura Malatto]

Dear all,

I want to bond my PDMS structure (with microfluidic chamber/ channels) 
over a Si device. My question is how can I do activation without an 
oxygen plasma dedicated equipment.
Can I use a sputtering machine? we have a sputtering with DC/RF source, 
and it has a bias to perform the plasma over the substrate (it is used 
to clean the surface before deposition). If yes, which gas do you 
recommend me to use?

thanks a lot
Laura