[mems-talk] dielectric breakdown of SiN and SiO2

dqzhang2003 at 163.com dqzhang2003 at 163.com
Thu Nov 30 06:59:11 EST 2006


Hi all,
   I am looking for the information about dielectric breakdown strength and dielectric constant of SiO2 film and SiN film. Does anyone know the information or tell me how I can get it?
Thank you!
 
Zhang D.Q.


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