[mems-talk] Oxide etching Vol 49, Issue 24

[huy vo]

Andrea:
  I guess you needed to use photoresist to selectively protect the nitride while creating the nitride mask right? why not use the same resist mask to etch the nitride? If it is a different mask, just use a new photoresist mask to etch the oxide using 6:1BOE.
   
  huy
   
   
   
  From: "Andrea Mazzolari" 
Subject: [mems-talk] Silicon oxide etch
To: "'General MEMS discussion'" 
Message-ID: <20061129170529.4228C800041 at smtp.fe.infn.it>
Content-Type: text/plain; charset="us-ascii"

Hi all,
I need to etch silicon oxide using a silicon nitride mask. Any 
suggestion
about a wet etchant which will etch only silicon oxide preserving 
silicon
nitride?