[mems-talk] How to get vertical sidewall for TOK PMER P-LA900PM?

[Ren Yang]

Hello,

Can anyone sugguest how to get vertical sidewall for
20um thick TOK PMER P-LA900PM photoresist with
broadband light source? The strcutre feature size is
10um. I expose this positive resist with a 1:1
projection exposure system. The numerical aperture of
the project lens is 0.14 with 30um DOF and 4um
resolution.

Thanks

Ren