[mems-talk] Gold plating through a via hole

[deepa sree]

Hello

I am trying to plate gold through a via hole of 100 um in diameter and 125um deep. I am having problems with gold plating solution getting trapped in the hole, though I am plating at a very slow rate. I wanted to know is there a way to overcome this or is there any other method to make a through hole contact. There is layer of Ti and a layer of sputtered gold in the via to which I want to make a contact.

Thanks,
Deepa