[mems-talk] How to get vertical sidewall for TOK PMER P-LA900PM?

[Bill Moffat]

With positive resist and image reversal any wall angle from -22 degrees
through vertical to +22 degrees is practical and controllable.  Contact
me for technical papers and explanations.
Bill Moffat, CEO
Yield Engineering Systems, Inc.
2185 Oakland Rd., San Jose, CA  95131
(408) 954-8353
 

-----Original Message-----
From: mems-talk-bounces at memsnet.org
[mailto:mems-talk-bounces at memsnet.org] On Behalf Of Ren Yang
Sent: Tuesday, October 03, 2006 5:46 PM
To: mems-talk at memsnet.org
Subject: [mems-talk] How to get vertical sidewall for TOK PMER
P-LA900PM?

Hello,

Can anyone sugguest how to get vertical sidewall for 20um thick TOK PMER
P-LA900PM photoresist with broadband light source? The strcutre feature
size is 10um. I expose this positive resist with a 1:1 projection
exposure system. The numerical aperture of the project lens is 0.14 with
30um DOF and 4um resolution.