[mems-talk] How to Get a mirror-like surface of silicon(100) using KOH wet silicon etch.

[XiongHeng]

Dear MEMS experts,
  I  have a need to have a mirror-like  surface of silicon(100) using KOH wet silicon etch. 
  When I used conventional KOH etching,the solutions that I experiment was "40% sol. at 80 deg"
and "30% sol. at 80 deg".But the roughness of the etched surface(100) is bad,Can't achieving our
demand. 
  I want to look for a solution which can achieve mirror-like suface using KOH etching.
  please Help me! Thank you very much!

                                                                xheng2000 at gmail.com
                                                                         2006-10-5