[mems-talk] photoresist peeled off together with PDMS

[Bo Bob Huo]

Recently I was confused by a problem. When I peeled off PDMS from
the master coated photoresist of shipley 1818, the photoresist was
always peeled off together with PDMS. Before curing PDMS, the
master had been exposed to a vapor of the chemical of chlorinated
silane to facilitate easy removal of PDMS. Can anyone give me a
help? Thanks in advance.

-/Bob