答复: [mems-talk] photoresist peeled off together with PDMS

[jianshi]

Hello 

May be before coating resist on Si wafer, coat a layer of primer 


>Recently I was confused by a problem. When I peeled off PDMS from
>the master coated photoresist of shipley 1818, the photoresist was
>always peeled off together with PDMS. Before curing PDMS, the
>master had been exposed to a vapor of the chemical of chlorinated
>silane to facilitate easy removal of PDMS. Can anyone give me a
>help? Thanks in advance.
>
>-/Bob