[mems-talk] How to Get a mirror-like surface of silicon(100)using KOH wet silicon etch.

Wilson, Thomas wilsont at marshall.edu
Thu Oct 5 16:36:56 EDT 2006

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Try a Syton polish - this results in a specular-reflection quality
surface. Details given in Appendix B of "Phonon reflection in silicon"
by Jane B. Throwe, Ph.D. thesis, Physics, Indiana University 1986.

TE Wilson
Marshall

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