[mems-talk] PMMA bonding with su8

jianshi jianshi at ens.fr
Fri Oct 6 04:48:58 EDT 2006


Hello 

If any one can tell me ,how to make bonding of PMMA  and su8 resist?

thanks

SHI JIAN
CNRS UMR 8640 PASTEUR
Département de chimie
Ecole normale superieure
24, rue Lhomond, F-75231 PARIS cedex 05
FRANCE
Phone: + 33 (0)1 44 32 2421
Fax: + 33 (0)1 44 32 24 02

 

 



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