[mems-talk] Re:How to Get a mirror-like surface of silicon(100) using KOH wet silicon etch

[abhaya joshi]

hi ,
i read your mail on MEMS talk.
In your case, you can try with 30wt% KOH at 70 C. With thi experimetn, Even
etch rate will be less but you will get good surface as well as good control
on etching.
it will better if you give details regariding how deep you are etching Si?
-abhay joshi
university of pune.