[mems-talk] Bonding PMMA and SU8

jianshi jianshi at ens.fr
Fri Oct 6 05:04:27 EDT 2006

Previous message: [mems-talk] Re:How to Get a mirror-like surface of silicon(100) using KOH wet silicon etch
Next message: [mems-talk] Bonding PMMA and SU8
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Hello 

 If any one can tell me ,how to make bonding of PMMA  and su8 resist?

thanks

SHI JIAN
Ecole normale superieure
24, rue Lhomond, F-75231 PARIS cedex 05
FRANCE

Previous message: [mems-talk] Re:How to Get a mirror-like surface of silicon(100) using KOH wet silicon etch
Next message: [mems-talk] Bonding PMMA and SU8
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the MEMS-talk mailing list