[mems-talk] How to Get a mirror-like surface of silicon(100) usingKOH wet silicon etch.

[Michael D Martin]

You might consider using HNA in the polishing regime every so often
during your KOH etch. 

-Mike
  U. of Louisville

>>> Tao <wang11 at fas.harvard.edu> 10/05/06 3:42 PM >>>
Hi,
 From my experience, it's hard to get a mirror like (100) or (110) 
surface. But (111) surface is always very smooth.
But some people did a good job:
1) http://staff.aist.go.jp/zhen.yang/smooth_etching.htm
2) Fast etching of silicon with a smooth surface in high temperature 
ranges near the boiling point of KOH solution TANAKA Hiroshi ; 
YAMASHITA Shuichi ; ABE Yoshitsugu ; SHIKIDA Mitsuhiro ; SATO Kazuo 
;Sensors and actuators. A, Physical  (Sens. actuators, A Phys.) 
 *ISSN* 0924-4247 2004, vol. 114, n^o 2-3, pp. 516-520 [5 page(s)
(article)]

I tested high T etch. I get better surface. But I can't say it's mirror 
like. It's just like a mirror with foggy areas.