[mems-talk] Bonding PMMA and SU8

[Mike Pinelis]

Hello, 

You can try a product called Microform (from Microchem) -- I've used it
to bond SU-8 and glass to make glass/SU-8/glass structures. 

Mike

Mike Pinelis
Ph.D. Candidate
University of Michigan
http://www.wimserc.org
http://www.eecs.umich.edu/maharbiz
http://www.memsinvestorjournal.com



-----Original Message-----
From: mems-talk-bounces at memsnet.org
[mailto:mems-talk-bounces at memsnet.org] On Behalf Of jianshi
Sent: Friday, October 06, 2006 5:04 AM
To: mems-talk at memsnet.org
Subject: [mems-talk] Bonding PMMA and SU8 

Hello 

 If any one can tell me ,how to make bonding of PMMA  and su8 resist?