[mems-talk] Spin On Passivation (glass or polyimide)

Lou Chomas lchomas at hotmail.com
Fri Oct 6 17:03:47 EDT 2006

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Hi,
    I'm looking for a supplier of spin on glass or polyimide.  I'd like 
thicker layers (>2 um) if possible and a process that keeps the wafers at 
reasonable temperatures (CMOS compatible; <400-500C).  Does anyone know who 
I might be able to order these materials from?

Thanks!

Lou Chomas

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