[mems-talk] Small SU-8 Pillars

[Kevin Christ]

Hello,

I would like to create a series of rows of short, round pillars out of 
SU-8.  I would like the pillars to be 12 microns in diameter and 5 
microns high.  Does anyone have an estimate as to how close I could 
get the individual pillars to each other?  I am planning on using a 
chrome-glass mask on a Karl Suss MA6/BA6 contact aligner.

Thank you,

Kevin

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Kevin V. Christ
Turner Research Group, http://ktgroup.me.wisc.edu
Department of Mechanical Engineering
University of Wisconsin, Madison
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