[mems-talk] Small SU-8 Pillars

[shay at mizur.com]

Kevin,
if the MA6 is tuned well 2u min space should be easy
shay

Original Message:
-----------------
From: Kevin Christ kchrist at wisc.edu
Date: Mon, 09 Oct 2006 11:28:25 -0500
To: mems-talk at memsnet.org
Subject: [mems-talk] Small SU-8 Pillars


Hello,

I would like to create a series of rows of short, round pillars out of 
SU-8.  I would like the pillars to be 12 microns in diameter and 5 
microns high.  Does anyone have an estimate as to how close I could 
get the individual pillars to each other?  I am planning on using a 
chrome-glass mask on a Karl Suss MA6/BA6 contact aligner.