[mems-talk] photoresist peeled off together with PDMS

[Huaibin Zhang]

--- Original message ----
>Date: Wed, 11 Oct 2006 10:14:43 -0700
>From: "Roger Shile" <rshile at nanoink.net>  
>Subject: RE: [mems-talk] photoresist peeled off together with PDMS  
>To: "'General MEMS discussion'" <mems-talk at memsnet.org>
>
>I'm curious what this "no stick" is for.  (The original question was a bit
>unclear - why is the guy trying to peel PDMS from "photoresis"?)  A Google
>for "no stick" returns "Crisco No-Stick Cooking Sprays" I'm sure this isn't
>what you're referring to:)
>
>-----Original Message-----

Hi Roger, 
"No stick" is a nickname for tridecafluoro 1,1,2,2 tetrahydrooctyl)-1-trichlorosilane. It is a pretty standard coating to decrease surface energy and it works as Teflon. The field we are talking about is soft lithography. PDMS is molded on a photoresist master to form duplicated pattern.
Huaibin
Huaibin Zhang

Chemistry Department
University of Illinois
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email: hzhang8 at uiuc.edu