[mems-talk] amorphous Si ethcing

[Ankush Singal]

what is mesa etching

On 10/13/06, Isaac Chan <iwchan at venus.uwaterloo.ca> wrote:
>
> Young,
>
> CF4 do create some polymerization and the polymer will accumulate on
> chamber wall over time after several runs. Do you clean your chamber with
> O2 plasma? a-Si:H at that thickness is yellowish brown color. Sometimes it
> can be confused with the polymer layer deposited on the etched area. When
> you say it doesn't etch, do you mean it looks the same by eye, by SEM, or
> has the same thickness measured by a profiler?
>
-- 
Ankush Singal
(862)684-5647
NJIT,Newark,NJ
U.S.A