[mems-talk] two layer fabrication by AZ P4620 and SU8 2050?

[qingye lu]

Is there anyone who has the experiences about two layer fabrication by AZ
and SU8 to share with me? Thanks a lot!

I want to fabricate thin channel with AZ photoresist (about 10 microns) and
thick bed with SU8 (about 60 microns) on 4" wafer. By combination these two
photoresist, it seems that I need to fabricate the SU8 first and then AZ
layer. However, the thick SU8 bed may largely affect the uniformity of the
thin AZ coating and make the design fails. Is there anyone who knows such
issues? Any help will be greatly appreciated

Qingye