[mems-talk] Partial Metallization of Vertical Walls

[Xiaoguang "Leo" Liu]

Dear all
I've been working on a project in fabricating cavity electromagnetic
resonators that require partial metallization of the side walls. For
example, I would like to produce a rectangular cavity  in the silicon
substrate by DRIE. I would then want 2 of the 4 side walls to be
metallized with gold while keeping the other 2 silicon. I've thought
really hard about this but could not find a way to meet the
requirement. The cavity in consideration is about 1mmx1mm big.

Does anybody have good suggestions? Thanks a lot

Best
Leo

-- 
Xiaoguang "Leo" Liu
Electrical and Computer Engineering
Purdue University
liu79 at purdue.edu