[mems-talk] To remove Al layer from PMMA/glass substrate

[Hyunsoo Park]

Thank you for reply.

I can't use gold right now. could anyone tell the solution to remove
Al layer without any damage to PMMA?

Otherwise, could anyone tell me another way to use glass substrate in
E-beam lithography?

Thank you.


On 10/13/06, Mathieu Foquet <mfoquet at pacificbiosciences.com> wrote:
> Any reason you're not using 5 to 10nm gold and then use a mix of KI/I2
> gold etch. I have asimilar ebeam process and this recipe has worked well
> for me.
>
> To my knowledge, Aluminium is more delicate to remove without moving to
> aggressive chemistries that would also affect your pmma.