[mems-talk] Surface Cleaning of Cu and Via

GQ Chu gqtchu at gmail.com
Mon Oct 16 13:04:24 EDT 2006


Hi,

I like to know what is the most effective means of cleaning the vias without
the solution attacking the Cu plated surface. I see a lot of loose particles
and organic residue in there. The size of my via is 12 um in diameter and is
20 um deep.

Thanks,
Joe


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