[mems-talk] Nickel wet etching

[Roger Shile]

I usually use Aluminum Etch (phosphoric Acid based) to etch Ni films.  I
believe JT Baker is a supplier.

Roger Shile

-----Original Message-----
From: mems-talk-bounces at memsnet.org [mailto:mems-talk-bounces at memsnet.org]
On Behalf Of prabhu arumugam
Sent: Wednesday, October 18, 2006 9:18 AM
To: General MEMS discussion
Subject: [mems-talk] Nickel wet etching

Hello MEMS folks,
can anyone tell me the what we use to etch nickel
films (approx. 30 nm thick)deposited by ebeam and the
supplier.