[mems-talk] Gold were elctroplating onto the edge of photoresist

[胡小东]

Dear All,
   In the past two months, while we did gold elctroplating, there were two gold "wings" extending from the gold line onto the edge of photoresist.
   photoresist: AZ1500, 2.5 micron thick.
   gold thickness: 2 micron
   "wing" thickness: 3 to 4 micron
   "wing" width: 10 to 20 micron
    
   current density 5.5 mA/cm2
   electoplating time 13min
   PH value: 7
   temperature: 50 degree 
   Has anyone experinced the same problem? May someone would give me any useful suggextiongs. Thanks!
   
   Huxiaodong