[mems-talk] Gold were elctroplating onto the edge of photoresist

[Michael D Martin]

You are likely getting an enhanced deposition rate due to high field regions at the edge of your features.  The work around for this is to do some pulse plating with a short period of reverse bias. 

-Michael Martin
 U. of Louisville


>>> "胡小东" <hu_xiaodong at 163.com> 10/25/06 10:38 PM >>>
 
Dear All,
   In the past two months, while we did gold elctroplating, there were two gold "wings" extending from the gold line onto the edge of photoresist.
   photoresist: AZ1500, 2.5 micron thick.
   gold thickness: 2 micron
   "wing" thickness: 3 to 4 micron
   "wing" width: 10 to 20 micron
    
   current density 5.5 mA/cm2
   electoplating time 13min
   PH value: 7
   temperature: 50 degree 
   Has anyone experinced the same problem? May someone would give me any useful suggextiongs. Thanks!
   
   Huxiaodong