[mems-talk] Wet etching SiN with photoresist

[蘇俊榮 Chun-Jung Su]

Dear all,

I am trying to etch 1000A-thick SiN with photoresist. I have used B.O.E. to
etch the SiN formed by our LPCVD system, but the etching rate is quite low,
i.e. 12 A/ min. Is there any other chemical solution to accomplish this job
?

Thanks in advance.


CJ