[mems-talk] searching for photoresist

[Sven Passinger]

Dear all,

up to now I’m working with the photoresists Ormocer and SU8. 

I have now the problem, that I need a resist of similar kind (optical
proparties, refractive index in the range of 1.4 to 1.6, illumination
wavelength in the range of 330 to 400nm) but with standard layer thikness
about 500nm (or even less). If possible the resist should have only few
losses at telecomunication wavelengths (1.55µm and 1.3µm) and resolutions
down to 100nm should be possible. Further advantage would be few losses at
visible wavelengths but this is not stringent necessary.


Thanks in advance

Sven Passinger